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2021-22 Fall - MECH5950 - Introduction to Microsystems: Technology and Devices

Course

Description

Physics of Scaling; energy transduction, sensing and actuation principles; micro-fabrication technology and technology fundamentals; film formation, photolithography and etching; integrated Microsystems and Microsystems packaging.
Course period1/09/21 → 31/12/21
Course levelPG
Course formatLecture