Description
Instructor(s)/Supervisor(s)/Coordinator(s): Hongyu YUMEMS stands for a class of batch-fabricated devices, consisting of mechanical, electrical, and other components to simulate macroscopic functions on a nano/micro scale. This interdisciplinary technology offers the great potential of reducing the cost, size, and power consumption for wide applications, such as consumer electronics, and scientific and engineering instruments. In this class, at first fundamental fabrication technology for nano/micro manufacture will be surveyed, and then a variety of nano/micro devices will be explored for different applications in aerospace engineering.