Description
Instructor(s)/Supervisor(s)/Coordinator(s): Kevin CHAUThis course introduces microsensors that have become pervasive in the past few decades. The essential interdisciplinary topics in mechanical engineering, piezoresistance, semiconductor processing, etc., are introduced from the standpoint of an electronic engineer. A few major types of microsensors are treated in depth to illustrate the transduction principles, design, construction, fabrication, packaging, and testing. Finally, the course is concluded with sensor fusion and applications.