2024-25 Fall - MECH5950 - Introduction to Microsystems: Technology and Devices

Yi-Kuen LEE

Department of Mechanical and Aerospace Engineering

Course

Description

Physics of Scaling; energy transduction, sensing and actuation principles; micro-fabrication technology and technology fundamentals; film formation, photolithography and etching; integrated Microsystems and Microsystems packaging.

Course period	1/09/24 → 31/12/24
Course level	PG
Course format	Lecture