2025-26 Fall - MSPY5001 - Semiconductor Devices and Processing

Course

Description

This course will introduce the electronic, transport and optical properties of semiconductor materials and their relations with the device performance. Various fabrication techniques (i.e., MBE, MOCVD, PVD and CVD) and processing steps such as photolithography, etching, thermal oxidation, ion-implantation and thin-film deposition for semiconductor device fabrication will be presented.
Course period1/09/2531/12/25
Course levelPG
Course formatLecture