An Integrated CMOS Mems Gas Flow Sensor with Detection Limit Towards Micrometer Per Second || The performance of the CMOS MEMS thermal flow sensor in this work is better than the performance of US National Standard using laser doppler anemometry (https://www.nist.gov/programs-projects/air-speed-metrology).: CMOS MEMS sensor shows a normalized sensitivity of 533μV/(m/s)/mW for N2 flow (-1.29m/s~1.29m/s). With the very low flow testing in the mixed convection regime (Gr/Re2>1), the TMCF sensor shows a good resolution of
Please elaborate if award type is "Others"
The performance of the CMOS MEMS thermal flow sensor in this work is better than the performance of US National Standard using laser doppler anemometry (https://www.nist.gov/programs-projects/air-speed-metrology).: CMOS MEMS sensor shows a normalized sensitivity of 533μV/(m/s)/mW for N2 flow (-1.29m/s~1.29m/s). With the very low flow testing in the mixed convection regime (Gr/Re2>1), the TMCF sensor shows a good resolution of
Awarded date
2020
Granting Organisations
IEEE International Conference on Micro Electro Mechanical Systems