W. Xu, X. Wang, X. Zhao, Z. Ke, Y.-K. Lee, “An Integrated CMOS MEMS Gas Flow Sensor with Detection Limit Towards Micrometer Per Second,” The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020), pp. 200-203, Vancouver, C
Awarded date
Jan 2020
Granting Organisations
The 33rd IEEE International Conference on Micro Electro Mechanical Systems