A Deep Reactive Ion Etching System for Nanosystem Fabrication

CHAI, Yang (PI)
CHOI, Hoi Wai (PI)
PANG, Stella W (PI)
MACPHERSON, Emma (PI)
ZHANG, Xuming (PI)
POON, Andrew Wing On (PI)
LAU, Kei May (PI)
YOBAS, Levent (PI)
WONG, Man (PI)
SIN, Johnny Kin On (PI)
FAN, Zhiyong (PI)
CHAN, Ho Bun (PI)
CHAN, Man Sun (PI)
YE, Wenjing (PI)
LEE, Yi-Kuen (PI)
LI, Zhigang (PI)
WEN, Weijia (PI)
LEE, Ricky Shi-wei (PI)
CHEUNG, Gary Shun Pan (PI)

Project: Research

Chinese Project Title

用於納米系統製造的反應離子深硅刻蝕設備

Status	Finished
Effective start/end date	1/02/17 → 31/01/20