A monolithically integrated CMOS-MEMS multifunctional sensor fusion chip for human respiratory monitoring

ZHENG, Jiufu (CoI)
ZHOU, Xiaoyong (CoI)
FANG, Mingdong (CoI)
FANG, Zetao (CoI)
YU, Hongyu (PI)
LU, Zhongrong (CoI)
MA, Xiaojian (CoI)
XU, Wei (CoI)
QIN, Fen (CoI)
WANG, Xiaoyi (CoI)
CHEUNG, Yik Kin (CoI)
LI, Yongkai (CoI)

Department of Mechanical and Aerospace Engineering

Project: Research

Chinese Project Title

基于CMOS MEMS集成工艺的高性能呼吸机用传感器的开发

Status	Finished
Effective start/end date	30/04/22 → 30/04/24