Research and industrial application of key technologies for efficient laser cutting and liftoff of large-size silicon carbide single crystals

YEUNG, Fion Sze Yan (CoI)
WONG, Man Hoi (CoI)
ZHOU, Hanqin (CoI)
YANG, Jiye (CoI)
HUANG, Shan (CoI)
LI, Zhiqiang (CoI)
WEN, Zuokai (CoI)

Department of Electronic and Computer Engineering

Project: Research

Chinese Project Title

大尺寸碳化硅单晶激光高效切割和剥离关键技术研究及产业化应用

Status	Active
Effective start/end date	1/01/25 → 31/12/27