Ultra Low-k Dielectric for Nano-CMOS Interconnect Delay Reduction

PRAWOTO, Clarissa Cyrilla (CoI)
MA, Zichao (CoI)
CHAN, Man Sun (PI)
XIAO, Ying (CoI)

Department of Electronic and Computer Engineering

Project: Research

Chinese Project Title

用于纳米CMOS互连延迟降低的超低k值电介质

Status	Finished
Effective start/end date	1/10/19 → 30/09/22