一种新颖的四梁式压电薄膜微型陀螺

利用壓電陶瓷的特性 ,采用IC兼容的技術 ,設計并制造了一種新穎的壓電薄膜微型陀螺 .在Pt/Ti/SiO2 /Si基底上以sol gel技術鋪設了高質量的壓電陶瓷薄膜 .基于壓電反效應 ,微型陀螺在其諧振頻率上被 0 .3V的交流信號驅動 .由其壓電正效應 ,可檢測到與轉動角速度成正比的輸出信號 .本文介紹了該微型陀螺的設計原理 .實驗結果證實了理論預測 . A novel piezoelectric micro-gyroscope is designed and fabricated on silicon crystal, with an IC compatibe technology .High quality PZT thin film is deposited by the sol-gel technique on Pt/Ti/ SiO2/Si substrate.Due to direct piezoelectric effect, the micro-gyroscope can be driven in a resonant state with a 0 .3 V AC source .The output is detected by the reverse piezoelectric effect and is nearly linearly proportional to the rotational speed .Its operation principle is given, and the theory is confirmed by experimental results .The total area of the micro-gyroscope is 2 .7 mm×2 .7 mm .The sensitivity of this sample micro-gyroscope is -30 .8μV·V -1·(°/ sec) -1 with a measurement range of 150°/ sec at a resonant frequency of 73 .84 kHz .