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薄膜厚度的多探头计算机实时测控系统

Translated title of the contribution: Real Time In-situ Monitoring and Controlling of Thin Film Growth with Multiple Quartz-probe

Research output: Contribution to journal › Journal Article

Translated title of the contributionReal Time In-situ Monitoring and Controlling of Thin Film Growth with Multiple Quartz-probe
Original languageChinese (Simplified)
Journal真空科学与技术
Publication statusPublished - 2001

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