金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.)

Hoi Sing Kwok; Zhiguo Meng; Man Wong; Chunya Wu; Shaozhen Xiong

金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.)

Hoi Sing Kwok, Zhiguo Meng, Man Wong, Chunya Wu, Shaozhen Xiong

The Hong Kong University of Science and Technology

Research output: Contribution to conference › Conference Paper

Original language	Chinese (Simplified)
Publication status	Published - 2005
Event	第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.) - Duration: 1 Jan 2005 → 1 Jan 2005

Conference

Conference	第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.)
Period	1/01/05 → 1/01/05

Access to Document

https://hdl.handle.net/1783.1/11193

Cite this

Kwok, H. S., Meng, Z., Wong, M., Wu, C., & Xiong, S. (2005). 金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.). Paper presented at 第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.). https://hdl.handle.net/1783.1/11193

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title = "金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.)",

author = "Kwok, \{Hoi Sing\} and Zhiguo Meng and Man Wong and Chunya Wu and Shaozhen Xiong",

year = "2005",

language = "Chinese (Simplified)",

note = "第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.) ; Conference date: 01-01-2005 Through 01-01-2005",

}

Kwok, HS, Meng, Z, Wong, M, Wu, C & Xiong, S 2005, '金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.)', Paper presented at 第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.), 1/01/05 - 1/01/05. <https://hdl.handle.net/1783.1/11193>

金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.). / Kwok, Hoi Sing; Meng, Zhiguo; Wong, Man et al.
2005. Paper presented at 第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.).

Research output: Contribution to conference › Conference Paper

TY - CONF

T1 - 金屬誘導單一方向棋向晶化和固體倍頻淚光退火技術在多晶硅薄膜晶體管中的應用 (In Chinese.)

AU - Kwok, Hoi Sing

AU - Meng, Zhiguo

AU - Wong, Man

AU - Wu, Chunya

AU - Xiong, Shaozhen

PY - 2005

Y1 - 2005

M3 - Conference Paper

T2 - 第十四屆全國半導體集成電路、硅材料學術會議 (The 14th National Conference on Integrated Circuit and Silicon Materials. Part A.)

Y2 - 1 January 2005 through 1 January 2005

ER -