Abstract
This paper demonstrates the first group of acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in Z-cut lithium niobate thin films. Thanks to the fast phase velocity, large coupling coefficient, and low-loss of A1 waves, the implemented ADLs significantly surpass the operation frequency of precious works with similar feature sizes. The impact of the key design parameters on the device performance is first discussed. The implemented ADLs at 5 GHz show a minimum insertion loss of 7.9 dB, and delays ranging between 15 ns and 109 ns over a fractional bandwidth around 4%. The propagation characteristics of A1 mode acoustic waves have also been extracted for the first time. The A1 ADLs can potentially enable wideband high-frequency passive signal processing functions for future 5G applications in the sub-6 GHz spectrum bands.
| Original language | English |
|---|---|
| Title of host publication | 2019 IEEE International Ultrasonics Symposium, IUS 2019 |
| Publisher | IEEE Computer Society |
| Pages | 265-268 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781728145969 |
| DOIs | |
| Publication status | Published - Oct 2019 |
| Externally published | Yes |
| Event | 2019 IEEE International Ultrasonics Symposium, IUS 2019 - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019 |
Publication series
| Name | IEEE International Ultrasonics Symposium, IUS |
|---|---|
| Volume | 2019-October |
| ISSN (Print) | 1948-5719 |
| ISSN (Electronic) | 1948-5727 |
Conference
| Conference | 2019 IEEE International Ultrasonics Symposium, IUS 2019 |
|---|---|
| Country/Territory | United Kingdom |
| City | Glasgow |
| Period | 6/10/19 → 9/10/19 |
Bibliographical note
Publisher Copyright:© 2019 IEEE.
Keywords
- A1 mode
- Acoustic delay line
- lithium niobate
- microelectro-mechanical systems
- piezoelectricity