5 GHz lithium niobate MEMS resonators with high FoM of 153

Yansong Yang; Anming Gao; Ruochen Lu; Songbin Gong

doi:10.1109/MEMSYS.2017.7863565

5 GHz lithium niobate MEMS resonators with high FoM of 153

Yansong Yang^*, Anming Gao, Ruochen Lu, Songbin Gong

^*Corresponding author for this work

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

117 Citations (Scopus)

Abstract

This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (k_t²) of 29% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt²Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	942-945
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863565
Publication status	Published - 23 Feb 2017
Externally published	Yes
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Access to Document

10.1109/MEMSYS.2017.7863565

Cite this

Yang, Y., Gao, A., Lu, R., & Gong, S. (2017). 5 GHz lithium niobate MEMS resonators with high FoM of 153. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 942-945). Article 7863565 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863565

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abstract = "This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29\% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.",

author = "Yansong Yang and Anming Gao and Ruochen Lu and Songbin Gong",

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Yang, Y, Gao, A, Lu, R & Gong, S 2017, 5 GHz lithium niobate MEMS resonators with high FoM of 153. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863565, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 942-945, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863565

5 GHz lithium niobate MEMS resonators with high FoM of 153. / Yang, Yansong; Gao, Anming; Lu, Ruochen et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 942-945 7863565 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - 5 GHz lithium niobate MEMS resonators with high FoM of 153

AU - Yang, Yansong

AU - Gao, Anming

AU - Lu, Ruochen

AU - Gong, Songbin

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.

AB - This paper reports on the demonstration of a new class of super-high frequency (SHF) microelectromechanical system (MEMS) resonators operating in the 5 GHz range. SHF resonances have been achieved using the first order antisymmetric (A1) mode, which features a phase velocity exceeding 10000 m/s in ion-sliced and suspended Z-cut Lithium Nio-bate (LiNbO3) thin films. The fabricated device has demonstrated a high electromechanical coupling (kt2) of 29% and a high quality factor (Q) of 527 simultaneously. Consequently, this work marks the first time that MEMS resonators at SHF were demonstrated with an extremely high figure of merit (FoM= kt2Q) of 153. The SHF operation and high FoM of these A1 mode devices have showcased their potential as the key building blocks for future SHF front-end filters and multiplexers.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

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Yang Y, Gao A, Lu R, Gong S. 5 GHz lithium niobate MEMS resonators with high FoM of 153. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 942-945. 7863565. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863565

5 GHz lithium niobate MEMS resonators with high FoM of 153

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