Abstract
This paper presents the first demonstration of a wideband hybrid monolithic acoustic filter in the K-band which exceeds the limitation of electromechanical coupling on the fractional bandwidth (FBW) of acoustic filters. The hybrid filter utilizes the co-design of EM and acoustic to attain wide bandwidth while keeping the advantages of small sizes and high Q in the acoustic domain. The fabricated filter built with resonators having an electromechanical coupling of 0.7% based on the seventh-order antisymmetric Lamb wave mode (A7) has a 3 dB FBW of 2.4% at 19 GHz, and a compact footprint of 1.4 mm2.
| Original language | English |
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| Title of host publication | IMS 2020 - 2020 IEEE/MTT-S International Microwave Symposium |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 241-244 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781728168159 |
| DOIs | |
| Publication status | Published - Aug 2020 |
| Externally published | Yes |
| Event | 2020 IEEE/MTT-S International Microwave Symposium, IMS 2020 - Virtual, Los Angeles, United States Duration: 4 Aug 2020 → 6 Aug 2020 |
Publication series
| Name | IEEE MTT-S International Microwave Symposium Digest |
|---|---|
| Volume | 2020-August |
| ISSN (Print) | 0149-645X |
Conference
| Conference | 2020 IEEE/MTT-S International Microwave Symposium, IMS 2020 |
|---|---|
| Country/Territory | United States |
| City | Virtual, Los Angeles |
| Period | 4/08/20 → 6/08/20 |
Bibliographical note
Publisher Copyright:© 2020 IEEE.
Keywords
- K-band
- Microelectromechanical systems
- Millimeter-wave devices
- Piezoelectric devices