A comb-drive actuator enabled dynamically tunable terahertz metamaterial

X. Zhao; J. Zhang; K. Fan; G. R. Keiser; G. Duan; R. D. Averitt; X. Zhang

doi:10.31438/trf.hh2016.58

A comb-drive actuator enabled dynamically tunable terahertz metamaterial

X. Zhao, J. Zhang, K. Fan, G. R. Keiser, G. Duan, R. D. Averitt, X. Zhang^*

^*Corresponding author for this work

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

Abstract

This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts ~60 GHz and the anti-symmetric mode redshifts ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.

Original language	English
Title of host publication	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Editors	Mark G. Allen, Tina Lamers
Publisher	Transducer Research Foundation
Pages	214-217
Number of pages	4
ISBN (Electronic)	9781940470023
DOIs	https://doi.org/10.31438/trf.hh2016.58
Publication status	Published - 2016
Externally published	Yes
Event	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States Duration: 5 Jun 2016 → 9 Jun 2016

Publication series

Name	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Country/Territory	United States
City	Hilton Head
Period	5/06/16 → 9/06/16

Bibliographical note

Publisher Copyright:
© 2016 TRF

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10.31438/trf.hh2016.58

Cite this

Zhao, X., Zhang, J., Fan, K., Keiser, G. R., Duan, G., Averitt, R. D., & Zhang, X. (2016). A comb-drive actuator enabled dynamically tunable terahertz metamaterial. In M. G. Allen, & T. Lamers (Eds.), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 (pp. 214-217). (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2016.58

@inproceedings{58fff3d8a35542eda3e04b07f42167e7,

title = "A comb-drive actuator enabled dynamically tunable terahertz metamaterial",

abstract = "This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts \textasciitilde{}60 GHz and the anti-symmetric mode redshifts \textasciitilde{}50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69\%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.",

author = "X. Zhao and J. Zhang and K. Fan and Keiser, \{G. R.\} and G. Duan and Averitt, \{R. D.\} and X. Zhang",

note = "Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",

year = "2016",

doi = "10.31438/trf.hh2016.58",

language = "English",

series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

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booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

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Zhao, X, Zhang, J, Fan, K, Keiser, GR, Duan, G, Averitt, RD & Zhang, X 2016, A comb-drive actuator enabled dynamically tunable terahertz metamaterial. in MG Allen & T Lamers (eds), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, Transducer Research Foundation, pp. 214-217, 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, Hilton Head, United States, 5/06/16. https://doi.org/10.31438/trf.hh2016.58

A comb-drive actuator enabled dynamically tunable terahertz metamaterial. / Zhao, X.; Zhang, J.; Fan, K. et al.
2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. ed. / Mark G. Allen; Tina Lamers. Transducer Research Foundation, 2016. p. 214-217 (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

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T1 - A comb-drive actuator enabled dynamically tunable terahertz metamaterial

AU - Zhao, X.

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AU - Keiser, G. R.

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AU - Averitt, R. D.

AU - Zhang, X.

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N2 - This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts ~60 GHz and the anti-symmetric mode redshifts ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.

AB - This paper reports our recent progress on a dynamically tunable terahertz metamaterial based on broadside-coupled split ring resonators (BC-SRRs) and a comb-drive actuator. In the structure, the coupling between two arrays of SRR is modulated with the lateral displacement exerted by the comb-drive actuator. In the spectrum of BC-SRRs, two resonant modes can be observed, i.e. symmetric mode and anti-symmetric mode, due to the strong inductive and capacitive coupling. Over 20 μm lateral displacement, the symmetric mode blueshifts ~60 GHz and the anti-symmetric mode redshifts ~50 GHz. The amplitude of the transmission at 1.03 THz is modulated by 69%. We can realize a large tuning range with structure optimization, thereby enabling the applications including THz modulators and chemical sensing.

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Zhao X, Zhang J, Fan K, Keiser GR, Duan G, Averitt RD et al. A comb-drive actuator enabled dynamically tunable terahertz metamaterial. In Allen MG, Lamers T, editors, 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. Transducer Research Foundation. 2016. p. 214-217. (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). doi: 10.31438/trf.hh2016.58

A comb-drive actuator enabled dynamically tunable terahertz metamaterial

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