A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application

Shun Qi Dai; Cristine Jin Estrada; Annan Xiong; Songcen Xu; Huanmei Yuan; Chen Xu; Jie George Yuan; Mansun Chan

doi:10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095

A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application

Shun Qi Dai, Cristine Jin Estrada, Annan Xiong, Songcen Xu, Huanmei Yuan, Chen Xu, Jie George Yuan, Mansun Chan

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

Abstract

This paper presents a new photonic demodulator with high sensitivity and modulation ability, which is important for Time-of-Flight (ToF) application. This proposed device called embedded guide gate photonic modulator or EGPD uses two gates inserted into the silicon to form an electric field to facilitate the extraction of the optical generated carrier in deep silicon. The influence of the embedded gate depth has been studied by TCAD simulation to achieve high sensitivity. To improve the frequency response of the EGPD with deep embedded gates, transfer channels are introduced into the embedded gates which makes the EGPD possible to be a potential device in the pixel of ToF CMOS image sensor.

Original language	English
Title of host publication	2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9798350334166
DOIs	https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095
Publication status	Published - 2023
Event	2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Hsinchu, Taiwan, Province of China Duration: 17 Apr 2023 → 20 Apr 2023

Publication series

Name	2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings

Conference

Conference	2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023
Country/Territory	Taiwan, Province of China
City	Hsinchu
Period	17/04/23 → 20/04/23

Bibliographical note

Publisher Copyright:
© 2023 IEEE.

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10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095

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Dai, S. Q., Estrada, C. J., Xiong, A., Xu, S., Yuan, H., Xu, C., Yuan, J. G., & Chan, M. (2023). A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application. In 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings (2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095

Dai, Shun Qi ; Estrada, Cristine Jin ; Xiong, Annan et al. / A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application. 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2023. (2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings).

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title = "A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application",

abstract = "This paper presents a new photonic demodulator with high sensitivity and modulation ability, which is important for Time-of-Flight (ToF) application. This proposed device called embedded guide gate photonic modulator or EGPD uses two gates inserted into the silicon to form an electric field to facilitate the extraction of the optical generated carrier in deep silicon. The influence of the embedded gate depth has been studied by TCAD simulation to achieve high sensitivity. To improve the frequency response of the EGPD with deep embedded gates, transfer channels are introduced into the embedded gates which makes the EGPD possible to be a potential device in the pixel of ToF CMOS image sensor.",

author = "Dai, \{Shun Qi\} and Estrada, \{Cristine Jin\} and Annan Xiong and Songcen Xu and Huanmei Yuan and Chen Xu and Yuan, \{Jie George\} and Mansun Chan",

note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 ; Conference date: 17-04-2023 Through 20-04-2023",

year = "2023",

doi = "10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095",

language = "English",

series = "2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings",

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Dai, SQ, Estrada, CJ, Xiong, A, Xu, S, Yuan, H, Xu, C, Yuan, JG & Chan, M 2023, A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application. in 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings. 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023, Hsinchu, Taiwan, Province of China, 17/04/23. https://doi.org/10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095

A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application. / Dai, Shun Qi; Estrada, Cristine Jin; Xiong, Annan et al.
2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2023. (2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

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T1 - A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application

AU - Dai, Shun Qi

AU - Estrada, Cristine Jin

AU - Xiong, Annan

AU - Xu, Songcen

AU - Yuan, Huanmei

AU - Xu, Chen

AU - Yuan, Jie George

AU - Chan, Mansun

PY - 2023

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N2 - This paper presents a new photonic demodulator with high sensitivity and modulation ability, which is important for Time-of-Flight (ToF) application. This proposed device called embedded guide gate photonic modulator or EGPD uses two gates inserted into the silicon to form an electric field to facilitate the extraction of the optical generated carrier in deep silicon. The influence of the embedded gate depth has been studied by TCAD simulation to achieve high sensitivity. To improve the frequency response of the EGPD with deep embedded gates, transfer channels are introduced into the embedded gates which makes the EGPD possible to be a potential device in the pixel of ToF CMOS image sensor.

AB - This paper presents a new photonic demodulator with high sensitivity and modulation ability, which is important for Time-of-Flight (ToF) application. This proposed device called embedded guide gate photonic modulator or EGPD uses two gates inserted into the silicon to form an electric field to facilitate the extraction of the optical generated carrier in deep silicon. The influence of the embedded gate depth has been studied by TCAD simulation to achieve high sensitivity. To improve the frequency response of the EGPD with deep embedded gates, transfer channels are introduced into the embedded gates which makes the EGPD possible to be a potential device in the pixel of ToF CMOS image sensor.

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M3 - Conference Paper published in a book

T3 - 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings

BT - 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023

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ER -

Dai SQ, Estrada CJ, Xiong A, Xu S, Yuan H, Xu C et al. A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application. In 2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2023. (2023 International VLSI Symposium on Technology, Systems and Applications, VLSI-TSA/VLSI-DAT 2023 - Proceedings). doi: 10.1109/VLSI-TSA/VLSI-DAT57221.2023.10134095

A High Sensitivity and Modulation Contrast Photonic Demodulator for Time-of-Flight Application

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