A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Lie Yi Sheng; Zhenan Tang; Jian Wu; Philip C.H. Chan; Johnny K.O. Sin

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Lie Yi Sheng, Zhenan Tang, Jian Wu, Philip C.H. Chan^*, Johnny K.O. Sin

^*Corresponding author for this work

Department of Electronic and Computer Engineering

Research output: Contribution to journal › Journal Article › peer-review

72 Citations (Scopus)

Abstract

This paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO₂ sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.

Original language	English
Pages (from-to)	81-87
Number of pages	7
Journal	Sensors and Actuators, B: Chemical
Volume	49
Issue number	1-2
Publication status	Published - 25 Jun 1998

Keywords

Integrated gas sensor
Lower power
Maskless tin oxide sputtering

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https://hdl.handle.net/1783.1/33079

Cite this

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title = "A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering",

abstract = "This paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO2 sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.",

keywords = "Integrated gas sensor, Lower power, Maskless tin oxide sputtering",

author = "Sheng, \{Lie Yi\} and Zhenan Tang and Jian Wu and Chan, \{Philip C.H.\} and Sin, \{Johnny K.O.\}",

year = "1998",

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language = "English",

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T1 - A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

AU - Sheng, Lie Yi

AU - Tang, Zhenan

AU - Wu, Jian

AU - Chan, Philip C.H.

AU - Sin, Johnny K.O.

PY - 1998/6/25

Y1 - 1998/6/25

N2 - This paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO2 sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.

AB - This paper describes a CMOS compatible integrated gas sensor. The device was designed so that the front-end fabrication is fully compatible with the standard CMOS process. The non-CMOS compatible fabrication steps were carried out as post-processing steps. This included the silicon anisotropic etch to create the thermally isolated micro-hotplate (MHP) and the deposition of gas-sensitive thin films using maskless r.f. SnO2 sputtering. The sensors exhibited high sensitivities to gases, such as ethanol and hydrogen.

KW - Integrated gas sensor

KW - Lower power

KW - Maskless tin oxide sputtering

UR - https://www.webofscience.com/wos/woscc/full-record/WOS:000075652400014

UR - https://www.scopus.com/pages/publications/0032094416

M3 - Journal Article

SN - 0925-4005

VL - 49

SP - 81

EP - 87

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 1-2

ER -

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

Abstract

Keywords

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