Abstract
In this letter, a fan-out-package-embedded power inductor technology is proposed. The inductor is embedded in a silicon-based fan-out package and surrounds the packaged die in which a voltage converter IC can be put. To demonstrate the integrated power inductor technology, a 2.4-nH air-core inductor for integrated voltage regulator applications is fabricated. The fabricated inductor shows a dc resistance of 5.0 text{m}Omega and quality factors of 43-67 in the frequency range of 100-500 MHz. The small dc resistance and high quality factors make this integrated inductor technology promising for integrated power conversion.
| Original language | English |
|---|---|
| Article number | 8943300 |
| Pages (from-to) | 268-271 |
| Number of pages | 4 |
| Journal | IEEE Electron Device Letters |
| Volume | 41 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Feb 2020 |
Bibliographical note
Publisher Copyright:© 1980-2012 IEEE.
Keywords
- Integrated inductor
- fan-out package
- integrated power conversion
- power inductor integration
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