Abstract
A new fin p-body insulated gate bipolar transistor (Fin-p IGBT) is designed and experimentally demonstrated. The device features wide trenches and spacer gates, which is implemented using a simple and low-cost process. Compared with the conventional floating p-body IGBT, the fabricated Fin-p IGBT is able to achieve remarkable reduction in both Miller capacitance (-60% at VCE of 15 V) and gate charge (-46%).
| Original language | English |
|---|---|
| Article number | 7094237 |
| Pages (from-to) | 591-593 |
| Number of pages | 3 |
| Journal | IEEE Electron Device Letters |
| Volume | 36 |
| Issue number | 6 |
| DOIs | |
| Publication status | Published - 1 Jun 2015 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Fin p-body
- Miller capacitance
- gate charge
- insulated gate bipolar transistor (IGBT)
- wide trench
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