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A new fin p-body insulated gate bipolar transistor with low miller capacitance

  • Hao Feng
  • , Wentao Yang
  • , Yuichi Onozawa
  • , Takashi Yoshimura
  • , Akira Tamenori
  • , Johnny K.O. Sin

Research output: Contribution to journalJournal Articlepeer-review

Abstract

A new fin p-body insulated gate bipolar transistor (Fin-p IGBT) is designed and experimentally demonstrated. The device features wide trenches and spacer gates, which is implemented using a simple and low-cost process. Compared with the conventional floating p-body IGBT, the fabricated Fin-p IGBT is able to achieve remarkable reduction in both Miller capacitance (-60% at VCE of 15 V) and gate charge (-46%).

Original languageEnglish
Article number7094237
Pages (from-to)591-593
Number of pages3
JournalIEEE Electron Device Letters
Volume36
Issue number6
DOIs
Publication statusPublished - 1 Jun 2015

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

  • Fin p-body
  • Miller capacitance
  • gate charge
  • insulated gate bipolar transistor (IGBT)
  • wide trench

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