Abstract
We report a compact hybrid optical sensor by vertically integrating an a-Si:H photodiode and a low-temperature polysilicon (LTPS) thin-film transistor (TFT). Such a photodiode-gated LTPS TFT combines sensing, storage, and readout switch functions and also has an internal photoconductive gain, resulting in a one-transistor active pixel sensor intended for high-resolution and high-sensitivity large-area imaging.
| Original language | English |
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| Title of host publication | 2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018 |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781538662342 |
| DOIs | |
| Publication status | Published - 9 Oct 2018 |
| Event | 2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018 - Shenzhen, China Duration: 6 Jun 2018 → 8 Jun 2018 |
Publication series
| Name | 2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018 |
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Conference
| Conference | 2018 IEEE International Conference on Electron Devices and Solid State Circuits, EDSSC 2018 |
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| Country/Territory | China |
| City | Shenzhen |
| Period | 6/06/18 → 8/06/18 |
Bibliographical note
Publisher Copyright:© 2018 IEEE.
Keywords
- Active Pixel Sensor
- LTPS TFT
- Photoconductive gain
- Photodiode