Access-region defect spectroscopy of DC-stressed N-polar GaN MIS-HEMTs

A. Sasikumar*, A. Arehart, S. Kolluri, M. H. Wong, S. Keller, S. P. Denbaars, J. S. Speck, U. K. Mishra, S. A. Ringel

*Corresponding author for this work

Research output: Contribution to journalJournal Articlepeer-review

34 Citations (Scopus)

Abstract

Distinct trap levels in the drain access regions of an N-polar GaN MIS-HEMT are investigated before and after semi-on dc stressing by thermal and optical trap spectroscopies. The most prominent dc stress effect was an increase in concentration of a pre-existing electron trap with an activation energy of 0.54 eV, accompanied by a decrease in concentration of an electron trap with a 0.65-eV activation energy. These distinct states had similar concentrations before stressing, with the 0.54-eV trap concentration dominating (by 6 ×) after stress. Deeper states revealed via optical measurements showed a mild ∼20% increase in total concentration after stressing.

Original languageEnglish
Article number6175102
Pages (from-to)658-660
Number of pages3
JournalIEEE Electron Device Letters
Volume33
Issue number5
DOIs
Publication statusPublished - May 2012
Externally publishedYes

Keywords

  • Constant current deep level optical spectroscopy (CID-DLOS)
  • Constant current deep level transient spectroscopy (CID-DLTS)
  • Dc stressing
  • Deep levels
  • GaN
  • High-electron-mobility transistor (HEMT)
  • Metal-organic chemical vapor deposition (MOCVD)
  • Trapping

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