AdaOPC 2.0: Enhanced Adaptive Mask Optimization Framework for via Layers
- Wenqian Zhao*
- , Xufeng Yao
- , Shuo Yin
- , Yang Bai
- , Ziyang Yu
- , Yuzhe Ma
- , Bei Yu
- , Martin D.F. Wong
*Corresponding author for this work
Research output: Contribution to journal › Journal Article › peer-review
6
Link opens in a new tab
Citations
(Scopus)