An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer

Hai Huang; Mengbing Liang; Rui Tang; Jon Oiler; Teng Ma; Hongyu Yu

doi:10.1109/Transducers.2013.6626919

An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer

Hai Huang, Mengbing Liang, Rui Tang, Jon Oiler, Teng Ma, Hongyu Yu

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

11 Citations (Scopus)

Abstract

This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s²) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.

Original language	English
Title of host publication	2013 Transducers and Eurosensors XXVII
Subtitle of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Pages	924-927
Number of pages	4
DOIs	https://doi.org/10.1109/Transducers.2013.6626919
Publication status	Published - 2013
Externally published	Yes
Event	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013

Publication series

Name	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Conference

Conference	2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Accelerometer
Electrolyte Droplet
Microelectromechanical Systems
Molecular Electronic Transducer

Access to Document

10.1109/Transducers.2013.6626919

Cite this

Huang, H., Liang, M., Tang, R., Oiler, J., Ma, T., & Yu, H. (2013). An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 (pp. 924-927). Article 6626919 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). https://doi.org/10.1109/Transducers.2013.6626919

Huang, Hai ; Liang, Mengbing ; Tang, Rui et al. / An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. pp. 924-927 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

@inproceedings{aa1b01590d0c44028a28a56fab2bbd3c,

title = "An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer",

abstract = "This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.",

keywords = "Accelerometer, Electrolyte Droplet, Microelectromechanical Systems, Molecular Electronic Transducer",

author = "Hai Huang and Mengbing Liang and Rui Tang and Jon Oiler and Teng Ma and Hongyu Yu",

year = "2013",

doi = "10.1109/Transducers.2013.6626919",

language = "English",

isbn = "9781467359818",

series = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

pages = "924--927",

booktitle = "2013 Transducers and Eurosensors XXVII",

note = "2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

}

Huang, H, Liang, M, Tang, R, Oiler, J, Ma, T & Yu, H 2013, An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. in 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013., 6626919, 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, pp. 924-927, 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626919

An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. / Huang, Hai; Liang, Mengbing; Tang, Rui et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 924-927 6626919 (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer

AU - Huang, Hai

AU - Liang, Mengbing

AU - Tang, Rui

AU - Oiler, Jon

AU - Ma, Teng

AU - Yu, Hongyu

PY - 2013

Y1 - 2013

N2 - This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.

AB - This paper reports a liquid-state low frequency micro-accelerometer based on molecular electronic transducer (MET) which senses movement of liquid electrolyte relative to fixed electrodes. The device employs a sub-microliter electrolyte droplet encapsulated in oil as the sensing body and MET electrodes as read-out mechanism. Silicon-based planar micro-fabrication technology is applied to simplify the fabrication and enable mass production. The device achieves sensitivity of 10.8 V/G (G = 9.81 m/s2) at 20 Hz with nearly flat response over the frequency range of 1-40 Hz and a low noise floor of 100 μG/√Hz at 20 Hz.

KW - Accelerometer

KW - Electrolyte Droplet

KW - Microelectromechanical Systems

KW - Molecular Electronic Transducer

UR - https://openalex.org/W1973563967

UR - https://www.scopus.com/pages/publications/84891709314

U2 - 10.1109/Transducers.2013.6626919

DO - 10.1109/Transducers.2013.6626919

M3 - Conference Paper published in a book

SN - 9781467359818

T3 - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

SP - 924

EP - 927

BT - 2013 Transducers and Eurosensors XXVII

T2 - 2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -

Huang H, Liang M, Tang R, Oiler J, Ma T, Yu H. An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer. In 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013. p. 924-927. 6626919. (2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013). doi: 10.1109/Transducers.2013.6626919

An electrolyte droplet-based low frequency accelerometer based on molecular electronic transducer

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Fingerprint

Cite this