Analysis of a MOS integrated gas sensor using a surface chemistry based model

Roy C.C. Li; Philip C.H. Chan; Peter W. Cheung

Analysis of a MOS integrated gas sensor using a surface chemistry based model

Roy C.C. Li^*, Philip C.H. Chan, Peter W. Cheung

^*Corresponding author for this work

Department of Electronic and Computer Engineering

Research output: Contribution to journal › Journal Article › peer-review

11 Citations (Scopus)

Abstract

To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H₂ sensor, the NH₃ sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

Original language	English
Pages (from-to)	233-242
Number of pages	10
Journal	Sensors and Actuators, B: Chemical
Volume	28
Issue number	3
Publication status	Published - Oct 1995

Keywords

Gas adsorption model
MOSFET sensors
Noise analysis

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https://hdl.handle.net/1783.1/27125

Cite this

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title = "Analysis of a MOS integrated gas sensor using a surface chemistry based model",

abstract = "To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2 sensor, the NH3 sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.",

keywords = "Gas adsorption model, MOSFET sensors, Noise analysis",

author = "Li, \{Roy C.C.\} and Chan, \{Philip C.H.\} and Cheung, \{Peter W.\}",

year = "1995",

month = oct,

language = "English",

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journal = "Sensors and Actuators, B: Chemical",

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T1 - Analysis of a MOS integrated gas sensor using a surface chemistry based model

AU - Li, Roy C.C.

AU - Chan, Philip C.H.

AU - Cheung, Peter W.

PY - 1995/10

Y1 - 1995/10

N2 - To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2 sensor, the NH3 sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

AB - To facilitate gas sensor design with the associated signal-conditioning circuitry, a previously developed gas adsorption model is implemented in the popular circuit simulation program SPICE. The model is based on the gas adsorption theory. With the adsorption model implemented in SPICE, the performance of a MOSFET gas sensor integrated with the associated circuitry can be studied. The analysis was applied to three sensors, namely, the H2 sensor, the NH3 sensor and the CO sensor. A noise analysis of the sensors was also performed and their lower bounds of detectivity determined. A chopper-stabilized circuit was applied to the sensing circuitry. Simulation results show that noise in gas sensors can be reduced.

KW - Gas adsorption model

KW - MOSFET sensors

KW - Noise analysis

UR - https://www.webofscience.com/wos/woscc/full-record/WOS:A1995TD06500010

UR - https://www.scopus.com/pages/publications/0029369856

M3 - Journal Article

SN - 0925-4005

VL - 28

SP - 233

EP - 242

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 3

ER -

Analysis of a MOS integrated gas sensor using a surface chemistry based model

Abstract

Keywords

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