Abstract
Lateral shear interferometers have large measurement range and good anti-disturbance ability. They have similar accuracy compared with the reference based interferometers. Based on a specially designed shear generator, a new lateral shear interferometer is proposed. The new system has a complete common optical path and a simple mechanism. The optical model of the interferometer is presented and the anti-vibration characteristics are analyzed. To validate its antivibration ability for on-machine surface measurement, experimental tests have been conducted and results presented.
| Original language | English |
|---|---|
| Pages (from-to) | 411-416 |
| Number of pages | 6 |
| Journal | Key Engineering Materials |
| Volume | 295-296 |
| DOIs | |
| Publication status | Published - 2005 |
Keywords
- On-machine measurement
- Shear interferometer
- Surface measurement
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