TY - GEN
T1 - Assembly and evaluation of MWCNTs probe thermal sensor by nanorobotic manipulation
AU - Yang, Zhan
AU - Nakajima, Masahiro
AU - Shen, Yajing
AU - Fukuda, Toshio
PY - 2012
Y1 - 2012
N2 - This paper reports a thermal sensor assembled by two multi-walled carbon nanotubes (MWCNTs) inside a field emission scanning electron microscope (FESEM) which constructed a probe tip in order to detect the local environment of single cell. An atomic force microscope (AFM) cantilever was used for substrate which is composed by Si3N4, and double side was covered by gold layer. Two MWCNTs were assembled to both side of AFM cantilever individually by employing a nanorobotic manipulation. Then another AFM cantilever was used as an end effector to manipulate the MWCNTs to touch, and used electron beam induced deposition (EBID) to bonding the two MWCNTs. The MWCNTs probe thermal sensor was evaluation inside a thermostated container for 30°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). We hope this result will be used rapidly in future.
AB - This paper reports a thermal sensor assembled by two multi-walled carbon nanotubes (MWCNTs) inside a field emission scanning electron microscope (FESEM) which constructed a probe tip in order to detect the local environment of single cell. An atomic force microscope (AFM) cantilever was used for substrate which is composed by Si3N4, and double side was covered by gold layer. Two MWCNTs were assembled to both side of AFM cantilever individually by employing a nanorobotic manipulation. Then another AFM cantilever was used as an end effector to manipulate the MWCNTs to touch, and used electron beam induced deposition (EBID) to bonding the two MWCNTs. The MWCNTs probe thermal sensor was evaluation inside a thermostated container for 30°C to 60°C. The experimental results show the positive characteristics of the temperature coefficient of resistance (TCR). We hope this result will be used rapidly in future.
UR - https://openalex.org/W2090931520
UR - https://www.scopus.com/pages/publications/84869163003
U2 - 10.1109/NANO.2012.6322046
DO - 10.1109/NANO.2012.6322046
M3 - Conference Paper published in a book
SN - 9781467321983
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Y2 - 20 August 2012 through 23 August 2012
ER -