Atomic scale defect formation and phase transformation in Si implanted β-Ga2O3

Hsien Lien Huang*, Christopher Chae, Jared M. Johnson, Alexander Senckowski, Shivam Sharma, Uttam Singisetti, Man Hoi Wong, Jinwoo Hwang

*Corresponding author for this work

Research output: Contribution to journalJournal Articlepeer-review

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