BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE

Xin Zhang; Yitshak Zohar; Tong Yi Zhang

doi:10.1115/IMECE1998-1272

BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE

Xin Zhang, Yitshak Zohar^*, Tong Yi Zhang

^*Corresponding author for this work

Department of Mechanical and Aerospace Engineering

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

Abstract

A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

Original language	English
Title of host publication	Micro-Electro-Mechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers (ASME)
Pages	379-384
Number of pages	6
ISBN (Electronic)	9780791815960
DOIs	https://doi.org/10.1115/IMECE1998-1272
Publication status	Published - 1998
Event	ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 - Anaheim, United States Duration: 15 Nov 1998 → 20 Nov 1998

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1998-AE

Conference

Conference	ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998
Country/Territory	United States
City	Anaheim
Period	15/11/98 → 20/11/98

Bibliographical note

Publisher Copyright:
© 1998 American Society of Mechanical Engineers (ASME). All rights reserved.

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10.1115/IMECE1998-1272

Cite this

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title = "BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE",

abstract = "A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.",

author = "Xin Zhang and Yitshak Zohar and Zhang, \{Tong Yi\}",

note = "Publisher Copyright: {\textcopyright} 1998 American Society of Mechanical Engineers (ASME). All rights reserved.; ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998 ; Conference date: 15-11-1998 Through 20-11-1998",

year = "1998",

doi = "10.1115/IMECE1998-1272",

language = "English",

series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)",

publisher = "American Society of Mechanical Engineers (ASME)",

pages = "379--384",

booktitle = "Micro-Electro-Mechanical Systems (MEMS)",

}

Zhang, X, Zohar, Y & Zhang, TY 1998, BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE. in Micro-Electro-Mechanical Systems (MEMS). ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1998-AE, American Society of Mechanical Engineers (ASME), pp. 379-384, ASME 1998 International Mechanical Engineering Congress and Exposition, IMECE 1998, Anaheim, United States, 15/11/98. https://doi.org/10.1115/IMECE1998-1272

BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE. / Zhang, Xin; Zohar, Yitshak; Zhang, Tong Yi.
Micro-Electro-Mechanical Systems (MEMS). American Society of Mechanical Engineers (ASME), 1998. p. 379-384 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1998-AE).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

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PY - 1998

Y1 - 1998

N2 - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

AB - A blister-like local buckling of polysilicon microbeams is observed at the end of the fabrication process. This buckling mode is a result of the capillary forces, developed during the drying stage, and the compressive residual stress in the polysilicon beams. A variety of microbeams were fabricated to study this phenomenon. The major parameters controlling the blister-like buckling have been identified experimentally. Furthermore, a model equation is derived to predict the blister properties as a function of the initial conditions. The agreement between the predictions and the measurements is found to be satisfactory.

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Y2 - 15 November 1998 through 20 November 1998

ER -

BLISTER-LIKE LOCAL BUCKLING OF POLYSILICON MICROBEAMS DURING WET-RELEASE

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