TY - JOUR
T1 - Charge collection ion microscopy
T2 - Imaging of defects in semiconductors with a positive ion microbeam
AU - Angell, David
AU - Marsh, B. B.
AU - Cue, N.
AU - Miao Jing-Wei, Jing-Wei
PY - 1989/12
Y1 - 1989/12
N2 - The new technique of Charge Collection Ion Microscopy (CCIM) for investigating defects in semiconductors is described. It utilizes the SUNY/Albany ion microbeam and is based on the collection efficiency of electron-hole (e-h) pairs produced by individual ions penetrating the sample. Compared to the technique of electron beam induced conductivity (EBIC), CCIM produces more damage per projectile but has the compensating advantage that more e-h pairs are created. Analysis of individual pulses rather than an average current therefore is necessary and practicable. Illustrative results are presented for Schottky diodes which have been locally damaged by ion bombardment.
AB - The new technique of Charge Collection Ion Microscopy (CCIM) for investigating defects in semiconductors is described. It utilizes the SUNY/Albany ion microbeam and is based on the collection efficiency of electron-hole (e-h) pairs produced by individual ions penetrating the sample. Compared to the technique of electron beam induced conductivity (EBIC), CCIM produces more damage per projectile but has the compensating advantage that more e-h pairs are created. Analysis of individual pulses rather than an average current therefore is necessary and practicable. Illustrative results are presented for Schottky diodes which have been locally damaged by ion bombardment.
UR - https://www.webofscience.com/wos/woscc/full-record/WOS:A1989CE98500009
UR - https://www.scopus.com/pages/publications/0024932941
U2 - 10.1016/0168-583X(89)90424-2
DO - 10.1016/0168-583X(89)90424-2
M3 - Journal Article
AN - SCOPUS:0024932941
SN - 0168-583X
VL - 44
SP - 172
EP - 178
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 2
ER -