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Chemistry-mediated two-dimensional to three-dimensional transition of in thin films

  • H. L. Wei
  • , Hanchen Huang*
  • , C. H. Woo
  • , X. X. Zhang
  • , L. G. Zhou
  • *Corresponding author for this work

Research output: Contribution to journalJournal Articlepeer-review

Abstract

The mechanism of chemistry-mediated two-dimensional to three-dimensional (2D-3D) transition during In thin film deposition was investigated. In was deposited on Au substrateusing magnetron sputtering technique. The formation of Au 3In on Au substrate resulted in the 2d-3D transition. It was observed that alloy formation leads to nonwetting of In, high mobility of In atoms and In clusters and well-separated In islands. The results show that structures of In and Au are characterized by scanning electron microscopy, transmission electron microscopy and electron diffraction.

Original languageEnglish
Pages (from-to)5401-5403
Number of pages3
JournalApplied Physics Letters
Volume84
Issue number26
DOIs
Publication statusPublished - 28 Jun 2004
Externally publishedYes

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