Composite nanowires from ion beam modification of Si nanowires

X. T. Zhou*, H. Y. Peng, N. G. Shang, N. Wang, I. Bello, C. S. Lee, S. T. Lee

*Corresponding author for this work

Research output: Contribution to journalConference article published in journalpeer-review

Abstract

Composite nanowires with typical diameters of 30-100nm, which consisted of Si, β-SiC, amorphous carbon were converted from Si nanowires by ion beam deposition. The Si nanorods were exposed to broad low energy ion beams. The low energy hydrocarbon, argon and hydrogen ions, generated in a Kaufman ion source, reacted with Si nanowires and formed the composite nanowires. It has been assumed that the reaction pathway to form the composite nanowires were driven by both thermal diffusion and kinetic energic of interacting particles.

Original languageEnglish
Pages (from-to)235-238
Number of pages4
JournalMaterials Research Society Symposium - Proceedings
Volume581
Publication statusPublished - 2000
Externally publishedYes
EventThe 1999 MRS Fall Meeting - Symposium F 'Nanophase and Nanocomposite Materials III' - Boston, MA, USA
Duration: 29 Nov 19992 Dec 1999

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