Conductive Material Deposition on Semiconductor with Phase Transition and Ohmic Contact in Situ

Zeying CHEN (Inventor), Ning WANG (Inventor), Wing Ki LO (Inventor), Sen YANG (Key Inventor)

Research output: Patent

Original languageEnglish
IPCH10D 64/01, H10D 64/62
Priority date26/07/23
Filing date24/07/24
Publication statusPublished - 28 Mar 2025

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