Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB-Stripe OLED Microdisplays

Shou Cheng Dong; Jiye Yang; Bryan Siu Ting Tam; Ching W. Tang

doi:10.1002/sdtp.17921

Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB-Stripe OLED Microdisplays

Shou Cheng Dong, Jiye Yang, Bryan Siu Ting Tam, Ching W. Tang

Research output: Contribution to journal › Conference article published in journal › peer-review

1 Citation (Scopus)

Abstract

Corrugated silicon nitride masks (SiNMs) with improved mechanical strength are developed for patterning OLED microdisplays. The corrugations in the nitride membrane significantly increase the rigidity of the mask and reduce sagging, enabling 3000-ppi slot apertures for patterning RGB-stripe pixel layouts that are normally not achievable by fine metal masks.

Original language	English
Pages (from-to)	1784-1785
Number of pages	2
Journal	Digest of Technical Papers - SID International Symposium
Volume	55
Issue number	1
DOIs	https://doi.org/10.1002/sdtp.17921
Publication status	Published - 2024
Externally published	Yes
Event	International Symposium, Seminar, and Exhibition, Display Week 2024 - San Jose, United States Duration: 12 May 2024 → 17 May 2024

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Publisher Copyright:
© 2024, John Wiley and Sons Inc. All rights reserved.

Keywords

Corrugation
Direct patterning
OLED microdisplays
Shadow mask
Silicon nitride

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10.1002/sdtp.17921

Cite this

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title = "Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB-Stripe OLED Microdisplays",

abstract = "Corrugated silicon nitride masks (SiNMs) with improved mechanical strength are developed for patterning OLED microdisplays. The corrugations in the nitride membrane significantly increase the rigidity of the mask and reduce sagging, enabling 3000-ppi slot apertures for patterning RGB-stripe pixel layouts that are normally not achievable by fine metal masks.",

keywords = "Corrugation, Direct patterning, OLED microdisplays, Shadow mask, Silicon nitride",

author = "Dong, \{Shou Cheng\} and Jiye Yang and \{Ting Tam\}, \{Bryan Siu\} and Tang, \{Ching W.\}",

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year = "2024",

doi = "10.1002/sdtp.17921",

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AU - Dong, Shou Cheng

AU - Yang, Jiye

AU - Ting Tam, Bryan Siu

AU - Tang, Ching W.

PY - 2024

Y1 - 2024

N2 - Corrugated silicon nitride masks (SiNMs) with improved mechanical strength are developed for patterning OLED microdisplays. The corrugations in the nitride membrane significantly increase the rigidity of the mask and reduce sagging, enabling 3000-ppi slot apertures for patterning RGB-stripe pixel layouts that are normally not achievable by fine metal masks.

AB - Corrugated silicon nitride masks (SiNMs) with improved mechanical strength are developed for patterning OLED microdisplays. The corrugations in the nitride membrane significantly increase the rigidity of the mask and reduce sagging, enabling 3000-ppi slot apertures for patterning RGB-stripe pixel layouts that are normally not achievable by fine metal masks.

KW - Corrugation

KW - Direct patterning

KW - OLED microdisplays

KW - Shadow mask

KW - Silicon nitride

UR - https://www.scopus.com/pages/publications/85202624899

U2 - 10.1002/sdtp.17921

DO - 10.1002/sdtp.17921

M3 - Conference article published in journal

AN - SCOPUS:85202624899

SN - 0097-966X

VL - 55

SP - 1784

EP - 1785

JO - Digest of Technical Papers - SID International Symposium

JF - Digest of Technical Papers - SID International Symposium

IS - 1

T2 - International Symposium, Seminar, and Exhibition, Display Week 2024

Y2 - 12 May 2024 through 17 May 2024

ER -

Corrugated Silicon Nitride Masks with Enhanced Mechanical Strength for Patterning RGB-Stripe OLED Microdisplays

Abstract

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Keywords

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