Design and implementation of an integrated floating-gate electrostatic power micro-generator

Wei Ma; Libor Rufer; Yitshak Zohar; Man Wong

Design and implementation of an integrated floating-gate electrostatic power micro-generator

Wei Ma^*, Libor Rufer, Yitshak Zohar, Man Wong

^*Corresponding author for this work

Department of Electronic and Computer Engineering

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

16 Citations (Scopus)

Abstract

The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	299-302
Number of pages	4
Publication status	Published - 2005
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	1

Conference

Conference	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

Keywords

Electroplating
Electrostatic MEMS device
Energy scavenging
Post-CMOS
Power generator

Cite this

Ma, W., Rufer, L., Zohar, Y., & Wong, M. (2005). Design and implementation of an integrated floating-gate electrostatic power micro-generator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 299-302). Article 2A2.3 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Ma, Wei ; Rufer, Libor ; Zohar, Yitshak et al. / Design and implementation of an integrated floating-gate electrostatic power micro-generator. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 299-302 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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title = "Design and implementation of an integrated floating-gate electrostatic power micro-generator",

abstract = "The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for {"}programming{"} and rectification. Good agreement between modeling and measurement results was obtained.",

keywords = "Electroplating, Electrostatic MEMS device, Energy scavenging, Post-CMOS, Power generator",

author = "Wei Ma and Libor Rufer and Yitshak Zohar and Man Wong",

year = "2005",

language = "English",

isbn = "0780389948",

series = "Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05",

pages = "299--302",

booktitle = "TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers",

note = "13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Ma, W, Rufer, L, Zohar, Y & Wong, M 2005, Design and implementation of an integrated floating-gate electrostatic power micro-generator. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 2A2.3, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 1, pp. 299-302, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05.

Design and implementation of an integrated floating-gate electrostatic power micro-generator. / Ma, Wei; Rufer, Libor; Zohar, Yitshak et al.
TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 299-302 2A2.3 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 1).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - Design and implementation of an integrated floating-gate electrostatic power micro-generator

AU - Ma, Wei

AU - Rufer, Libor

AU - Zohar, Yitshak

AU - Wong, Man

PY - 2005

Y1 - 2005

N2 - The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.

AB - The design, modeling and implementation of a single-wafer integrated floating-gate electrostatic power micro-generator are described. Both linear and non-linear models are developed. Realized using a standard CMOS floating-gate process and a CMOS-compatible photo-resist molded electroplating process, the generator contains an electromechanical resonator for energy generation/conversion and electronic devices for "programming" and rectification. Good agreement between modeling and measurement results was obtained.

KW - Electroplating

KW - Electrostatic MEMS device

KW - Energy scavenging

KW - Post-CMOS

KW - Power generator

UR - https://www.scopus.com/pages/publications/27544454594

M3 - Conference Paper published in a book

AN - SCOPUS:27544454594

SN - 0780389948

T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

SP - 299

EP - 302

BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers

T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Ma W, Rufer L, Zohar Y, Wong M. Design and implementation of an integrated floating-gate electrostatic power micro-generator. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 299-302. 2A2.3. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

Design and implementation of an integrated floating-gate electrostatic power micro-generator

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Keywords

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