TY - GEN
T1 - Development of a micro seismometer based on molecular electronic transducer technology for planetary exploration
AU - Huang, Hai
AU - Carande, Bryce
AU - Tang, Rui
AU - Oiler, Jon
AU - Dmitriy, Zaitsev
AU - Vadim, Agafonov
AU - Yu, Hongyu
PY - 2013
Y1 - 2013
N2 - Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This paper reports an approach to build a micro MET seismometer using Micro-Electro-Mechanical Systems (MEMS) techniques. We have reduced the MET cell size, resulting in internal dimensions close to 1 micrometer (μm). The employment of MEMS improves the sensitivity up to 400V (m/s2) and reproducibility of the device, and has reached 1 micro Gee (1.0 ×10-5 m/s2/√Hz) noise level at 1 Hz.
AB - Molecular Electronic Transducer (MET) is a recent technology applied in seismic instrumentation that proves highly beneficial to planetary seismology. MET is an electrochemical cell that senses the movement of liquid electrolyte between electrodes by converting it to the output current. Seismometers based on MET technology are attractive for planetary applications due to their high sensitivity, low noise floor, small size, lack of fragile moving parts and independence on the direction of sensitivity axis. This paper reports an approach to build a micro MET seismometer using Micro-Electro-Mechanical Systems (MEMS) techniques. We have reduced the MET cell size, resulting in internal dimensions close to 1 micrometer (μm). The employment of MEMS improves the sensitivity up to 400V (m/s2) and reproducibility of the device, and has reached 1 micro Gee (1.0 ×10-5 m/s2/√Hz) noise level at 1 Hz.
UR - https://openalex.org/W2044438058
UR - https://www.scopus.com/pages/publications/84875453490
U2 - 10.1109/MEMSYS.2013.6474320
DO - 10.1109/MEMSYS.2013.6474320
M3 - Conference Paper published in a book
SN - 9781467356558
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 629
EP - 632
BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Y2 - 20 January 2013 through 24 January 2013
ER -