Abstract
Degradation in low-temperature poly-Si TFT devices was studied for high-field stressing hot-carrier stressing as well as gamma radiation stressing. It was found that degradation is dominated by electron trapping in the gate oxide that causes a parallel rightward shift in the transfer curves. The other probable mechanisms involved include generation of mid-gap defects in the bulk polysilicon and creation of mid-gap defects in the bulk polysilicon and creation of interface states at the Si/SiO2 interface.
| Original language | English |
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| Pages | 258-262 |
| Number of pages | 5 |
| Publication status | Published - 2001 |
| Externally published | Yes |
| Event | 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001) - Singapure, Singapore Duration: 9 Jul 2001 → 13 Jul 2001 |
Conference
| Conference | 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA 2001) |
|---|---|
| Country/Territory | Singapore |
| City | Singapure |
| Period | 9/07/01 → 13/07/01 |