Dispersion engineering of high-Q Si3N4 microdisk resonators

Kaiyi Wu; Andrew W. Poon

doi:10.1364/CLEO_SI.2018.SW4B.4

Dispersion engineering of high-Q Si₃N₄ microdisk resonators

Kaiyi Wu, Andrew W. Poon^*

^*Corresponding author for this work

Department of Electronic and Computer Engineering

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

2 Citations (Scopus)

Abstract

We demonstrate Si₃N₄ waveguide-coupled microdisk resonators with a loaded Q-factor of 2.4×106 at 1550 nm. We tailor the cavity dispersion by increasing the Si₃N₄ microdisk thickness and using a thin oxide cladding.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2018
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580422
DOIs	https://doi.org/10.1364/CLEO_SI.2018.SW4B.4
Publication status	Published - 2018
Event	CLEO: Science and Innovations, CLEO_SI 2018 - San Jose, United States Duration: 13 May 2018 → 18 May 2018

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F94-CLEO_SI 2018
ISSN (Electronic)	2162-2701

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2018
Country/Territory	United States
City	San Jose
Period	13/05/18 → 18/05/18

Bibliographical note

Publisher Copyright:
© OSA 2018.

Access to Document

10.1364/CLEO_SI.2018.SW4B.4

Cite this

@inproceedings{ec0764835ea14406a7c0608fe8bc76a8,

title = "Dispersion engineering of high-Q Si3N4 microdisk resonators",

abstract = "We demonstrate Si3N4 waveguide-coupled microdisk resonators with a loaded Q-factor of 2.4×106 at 1550 nm. We tailor the cavity dispersion by increasing the Si3N4 microdisk thickness and using a thin oxide cladding.",

author = "Kaiyi Wu and Poon, \{Andrew W.\}",

note = "Publisher Copyright: {\textcopyright} OSA 2018.; CLEO: Science and Innovations, CLEO\_SI 2018 ; Conference date: 13-05-2018 Through 18-05-2018",

year = "2018",

doi = "10.1364/CLEO\_SI.2018.SW4B.4",

language = "English",

isbn = "9781943580422",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "CLEO",

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T1 - Dispersion engineering of high-Q Si3N4 microdisk resonators

AU - Wu, Kaiyi

AU - Poon, Andrew W.

PY - 2018

Y1 - 2018

N2 - We demonstrate Si3N4 waveguide-coupled microdisk resonators with a loaded Q-factor of 2.4×106 at 1550 nm. We tailor the cavity dispersion by increasing the Si3N4 microdisk thickness and using a thin oxide cladding.

AB - We demonstrate Si3N4 waveguide-coupled microdisk resonators with a loaded Q-factor of 2.4×106 at 1550 nm. We tailor the cavity dispersion by increasing the Si3N4 microdisk thickness and using a thin oxide cladding.

UR - https://www.scopus.com/pages/publications/85082370057

UR - https://openalex.org/W2799815370

U2 - 10.1364/CLEO_SI.2018.SW4B.4

DO - 10.1364/CLEO_SI.2018.SW4B.4

M3 - Conference Paper published in a book

AN - SCOPUS:85082370057

SN - 9781943580422

T3 - Optics InfoBase Conference Papers

BT - CLEO

PB - Optica Publishing Group (formerly OSA)

T2 - CLEO: Science and Innovations, CLEO_SI 2018

Y2 - 13 May 2018 through 18 May 2018

ER -