| Original language | Chinese (Simplified) |
|---|---|
| IPC | H01L 27/12, H01L 21/77, H01L 27/32, H01L 29/41 |
| Priority date | 10/05/19 |
| Filing date | 10/05/19 |
| Publication status | Published - 10 Sept 2019 |
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Lei LU (Inventor), Zhihe XIA (Inventor), Jiapeng LI (Inventor), Man WONG (Inventor), Hoi Sing KWOK (Key Inventor)
Research output: Patent
| Original language | Chinese (Simplified) |
|---|---|
| IPC | H01L 27/12, H01L 21/77, H01L 27/32, H01L 29/41 |
| Priority date | 10/05/19 |
| Filing date | 10/05/19 |
| Publication status | Published - 10 Sept 2019 |