| Original language | English |
|---|---|
| Publication status | Published - 2005 |
| Event | Proceedings of the Symposium on Design, Test, Integration, Packaging (DTIP) of MEMS/MEOMS, Montreux, Switzerland - Duration: 1 Jan 2005 → 1 Jan 2005 |
Conference
| Conference | Proceedings of the Symposium on Design, Test, Integration, Packaging (DTIP) of MEMS/MEOMS, Montreux, Switzerland |
|---|---|
| Period | 1/01/05 → 1/01/05 |