Effect of oxygen stoichiometry on microstructural and magnetic properties of FePt/TaOx bilayer fabricated by ion-beam-bombardment deposition

G. J. Li, C. W. Leung, Y. C. Chen, J. H. Hsu, A. C. Sun, K. W. Lin*, Philip W.T. Pong

*Corresponding author for this work

Research output: Contribution to journalJournal Articlepeer-review

4 Citations (Scopus)

Abstract

The effect of TaOx capping layer on microstructures and magnetic properties of FePt thin films via annealing was studied. The structural ordering of FePt from face-centered cubic to face-centered tetragonal phases depends strongly on the oxygen contents in the capping TaOx layer. The role of the TaOx layer is used to separate the FePt grains, as revealed by TEM. The annealed FePt/TaOx (15%O2/Ar) exhibited the largest out-of-plane coercivity (Hc 4.2 kOe) amongst all samples, compared to that (∼2.4 kOe) in the reference FePt layer. At low oxygen content in FePt/TaOx bilayers, the Ta atoms may act as defects to obstruct the FePt ordering whereas at high oxygen contents, the excess oxygen atoms diffuse into the FePt layer and react with Fe to form iron oxides which give rise to the low coercivities, as characterized by the XPS depth profile and binding energy analysis.

Original languageEnglish
Article number6559126
Pages (from-to)3310-3313
Number of pages4
JournalIEEE Transactions on Magnetics
Volume49
Issue number7
DOIs
Publication statusPublished - 2013
Externally publishedYes

Keywords

  • FePt
  • ion-beam bombardment
  • magnetic properties

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