Elastic constant effect on the critical thickness of an epilayer

Tong Yi Zhang

doi:10.1557/PROC-356-325

Elastic constant effect on the critical thickness of an epilayer

Tong Yi Zhang^*

^*Corresponding author for this work

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Conference article published in journal › peer-review

Abstract

The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

Original language	English
Pages (from-to)	325-330
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	356
DOIs	https://doi.org/10.1557/PROC-356-325
Publication status	Published - 1995
Event	Proceedings of the 1994 MRS Fall Meeting - Boston, MA, USA Duration: 28 Nov 1994 → 2 Dec 1994

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title = "Elastic constant effect on the critical thickness of an epilayer",

abstract = "The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.",

author = "Zhang, \{Tong Yi\}",

year = "1995",

doi = "10.1557/PROC-356-325",

language = "English",

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pages = "325--330",

journal = "Materials Research Society Symposium - Proceedings",

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T1 - Elastic constant effect on the critical thickness of an epilayer

AU - Zhang, Tong Yi

PY - 1995

Y1 - 1995

N2 - The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

AB - The effect of elastic constants on the critical thickness of an epilayer is investigated. The results indicate that the self energy of the dislocation is controlled by the soft phase between the epilayer and the substrate, while the interaction energy only depends on the elastic constants of the epilayer. It is easier for a dislocation to be formed if the substrate is softer than the epilayer, and consequently the critical thickness is smaller. On the other hand, a soft epilayer can have a large thickness without any mismatch dislocation.

UR - https://www.scopus.com/pages/publications/0029217169

U2 - 10.1557/PROC-356-325

DO - 10.1557/PROC-356-325

M3 - Conference article published in journal

AN - SCOPUS:0029217169

SN - 0272-9172

VL - 356

SP - 325

EP - 330

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1994 MRS Fall Meeting

Y2 - 28 November 1994 through 2 December 1994

ER -

Elastic constant effect on the critical thickness of an epilayer

Abstract

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