TY - JOUR
T1 - Fabrication of large-size photonic crystals by holographic lithography using a lens array
AU - Liang, Bing
AU - Liu, Yikun
AU - Li, Juntao
AU - Song, Liyan
AU - Li, Yongyao
AU - Zhou, Jianying
AU - Wong, Kam Sing
PY - 2012/3
Y1 - 2012/3
N2 - Holographic fabrication of large-size photonic crystals with a lens array is proposed and demonstrated. A substantial increase of the usable size for two-dimensional and three-dimensional photonic crystals is obtained compared with the template prepared with a mask and a single-lens system.
AB - Holographic fabrication of large-size photonic crystals with a lens array is proposed and demonstrated. A substantial increase of the usable size for two-dimensional and three-dimensional photonic crystals is obtained compared with the template prepared with a mask and a single-lens system.
UR - https://www.webofscience.com/wos/woscc/full-record/WOS:000301171300013
UR - https://openalex.org/W2062328638
UR - https://www.scopus.com/pages/publications/84863288440
U2 - 10.1088/0960-1317/22/3/035013
DO - 10.1088/0960-1317/22/3/035013
M3 - Journal Article
SN - 0960-1317
VL - 22
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 3
M1 - 035013
ER -