Failure Modes of Doubly Supported Capacitive RF MEMS Switches

Li Xian Zhang; Jin Wen Zhang; Ya Pu Zhao; Tong Xi Yu

doi:10.1515/IJNSNS.2002.3.3-4.353

Failure Modes of Doubly Supported Capacitive RF MEMS Switches

Li Xian Zhang, Jin Wen Zhang, Ya Pu Zhao^*, Tong Xi Yu

^*Corresponding author for this work

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Journal Article › peer-review

23 Citations (Scopus)

Abstract

For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.

Original language	English
Pages (from-to)	353-356
Number of pages	4
Journal	International Journal of Nonlinear Sciences and Numerical Simulation
Volume	3
Issue number	3-4
DOIs	https://doi.org/10.1515/IJNSNS.2002.3.3-4.353
Publication status	Published - 2002

Keywords

Failure mode
Fracture
RF MEMS
Reliability
Residual stress
Stiction
Stress gradient

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10.1515/IJNSNS.2002.3.3-4.353

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abstract = "For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.",

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author = "Zhang, \{Li Xian\} and Zhang, \{Jin Wen\} and Zhao, \{Ya Pu\} and Yu, \{Tong Xi\}",

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AU - Zhang, Jin Wen

AU - Zhao, Ya Pu

AU - Yu, Tong Xi

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N2 - For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.

AB - For the design of radio frequency micro-electro-mechanical systems (RF MEMS) switches, the reliability issue becomes increasingly important. This paper represents some failure phenomena of doubly supported capacitive RF MEMS switches that include observable destruction failure and directly measurable parameter degradation obtained from the actuating-voltage testing and scanning electron microscope (SEM) observation. The relevant failure modes as well as their failure mechanisms are identified.

KW - Failure mode

KW - Fracture

KW - RF MEMS

KW - Reliability

KW - Residual stress

KW - Stiction

KW - Stress gradient

UR - https://www.scopus.com/pages/publications/0036319664

U2 - 10.1515/IJNSNS.2002.3.3-4.353

DO - 10.1515/IJNSNS.2002.3.3-4.353

M3 - Journal Article

AN - SCOPUS:0036319664

SN - 1565-1339

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EP - 356

JO - International Journal of Nonlinear Sciences and Numerical Simulation

JF - International Journal of Nonlinear Sciences and Numerical Simulation

IS - 3-4

ER -

Failure Modes of Doubly Supported Capacitive RF MEMS Switches

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Keywords

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