Abstract
GaAs Esaki junctions were grown at normal growth temperatures above 550 °C by low pressure metalorganic chemical vapor deposition. The n sides of these junctions were heavily doped with silane into the regime that impurities were autocompensated. Consequently, zero-bias tunnel resistance was significantly reduced. We obtained a low zero-bias specific tunnel resistance of 9.6 × 10 -5 Ω cm 2 with an optimized silane flow rate.
| Original language | English |
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| Pages (from-to) | 4415-4417 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 85 |
| Issue number | 19 |
| DOIs | |
| Publication status | Published - 8 Nov 2004 |