GaAs Esaki junctions with autocompensated impurities in the n side by metalorganic chemical vapor deposition

Jizhi Zhang*, Kei May Lau

*Corresponding author for this work

Research output: Contribution to journalJournal Articlepeer-review

1 Citation (Scopus)

Abstract

GaAs Esaki junctions were grown at normal growth temperatures above 550 °C by low pressure metalorganic chemical vapor deposition. The n sides of these junctions were heavily doped with silane into the regime that impurities were autocompensated. Consequently, zero-bias tunnel resistance was significantly reduced. We obtained a low zero-bias specific tunnel resistance of 9.6 × 10 -5 Ω cm 2 with an optimized silane flow rate.

Original languageEnglish
Pages (from-to)4415-4417
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number19
DOIs
Publication statusPublished - 8 Nov 2004

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