GaAs on (001) Si templates for near infrared InP QD lasers

Jie Huang, Qi Lin, Wei Luo, Liying Lin, Kei May Lau

Research output: Chapter in Book/Conference Proceeding/ReportConference Paper published in a bookpeer-review

Abstract

In this report, we investigate the effects of thermal cycle annealing at high temperature on the defect density and the morphology of GaAs epilayers grown on (001) Si substrates. The defect density of a 2.7 μm-thick GaAs/Si template is 1.4 ×107 cm-2 based on the observation of plan-view transmission electron microscopy, and the surface roughness of the GaAs/Si template is 1.3 nm after the insertion of dislocation filter layers. Optically pumped InP quantum dot microdisk lasers (MDLs) grown on these GaAs/Si templates are fabricated to evaluate the quality of the GaAs/Si templates. Room temperature continuous-wave lasing of the 1.5 μm-diameter MDLs are observed, with very low lasing thresholds ranging from 0.5 to 2 μW.

Original languageEnglish
Title of host publication2022 Compound Semiconductor Week, CSW 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665453400
DOIs
Publication statusPublished - 2022
Event2022 Compound Semiconductor Week, CSW 2022 - Ann Arbor, United States
Duration: 1 Jun 20223 Jun 2022

Publication series

Name2022 Compound Semiconductor Week, CSW 2022

Conference

Conference2022 Compound Semiconductor Week, CSW 2022
Country/TerritoryUnited States
CityAnn Arbor
Period1/06/223/06/22

Bibliographical note

Publisher Copyright:
© 2022 IEEE.

Keywords

  • GaAs/Si template
  • lasers
  • roughness

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