TY - GEN
T1 - Harmonic operation of acoustic transducer for droplet ejection application
AU - Lee, Chuang Yuan
AU - Yu, Hongyu
AU - Kim, Eun Sok
PY - 2007
Y1 - 2007
N2 - This paper reports the use of harmonic frequencies for acoustic ejection in order to eject micron-sized droplets. For an acoustic ejector working at the thickness-mode resonance, the droplet size is primarily determined by the acoustic wavelength, which is proportional to the piezoelectric substrate thickness. In the newly invented design, we do not lap the bulk piezoelectric PZT substrate or use PZT thin films, but use harmonic frequencies of the bulk form to reduce the wavelength. The acoustic ejectors utilizing harmonic frequencies have been fabricated and shown to be very effective up to the 9th harmonic (∼180 MHz), ejecting droplets as small as 10 μm in diameter.
AB - This paper reports the use of harmonic frequencies for acoustic ejection in order to eject micron-sized droplets. For an acoustic ejector working at the thickness-mode resonance, the droplet size is primarily determined by the acoustic wavelength, which is proportional to the piezoelectric substrate thickness. In the newly invented design, we do not lap the bulk piezoelectric PZT substrate or use PZT thin films, but use harmonic frequencies of the bulk form to reduce the wavelength. The acoustic ejectors utilizing harmonic frequencies have been fabricated and shown to be very effective up to the 9th harmonic (∼180 MHz), ejecting droplets as small as 10 μm in diameter.
KW - Acoustic ejector
KW - Droplet
KW - Harmonics
UR - https://openalex.org/W2037862857
UR - https://www.scopus.com/pages/publications/50049106009
U2 - 10.1109/SENSOR.2007.4300372
DO - 10.1109/SENSOR.2007.4300372
M3 - Conference Paper published in a book
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1283
EP - 1286
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -