Abstract
The performance of a gate-body tied silicon-on-insulator (SOI) MOSFET optical sensor fabricated with a dynamic threshold MOSFET (DTMOSFET) process is investigated. With a dimension of 5 μm width by 2 μm length, the optical current generated is in the order of micro-ampere, which can be directly readout for processing. The optical current can be further increased by reducing the channel length, thus reduction and performance enhancement can be achieved at the same time.
| Original language | English |
|---|---|
| Pages | 149-150 |
| Number of pages | 2 |
| Publication status | Published - 1998 |
| Event | Proceedings of the 1998 IEEE International SOI Conference - Stuart, FL, USA Duration: 5 Oct 1998 → 8 Oct 1998 |
Conference
| Conference | Proceedings of the 1998 IEEE International SOI Conference |
|---|---|
| City | Stuart, FL, USA |
| Period | 5/10/98 → 8/10/98 |
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