High responsivity photo-sensor using gate-body tied SOI MOSFET

Weiquan Zhang*, Mansun Chan, Ru Huang, Ping K. Ko

*Corresponding author for this work

Research output: Contribution to conferenceConference Paperpeer-review

Abstract

The performance of a gate-body tied silicon-on-insulator (SOI) MOSFET optical sensor fabricated with a dynamic threshold MOSFET (DTMOSFET) process is investigated. With a dimension of 5 μm width by 2 μm length, the optical current generated is in the order of micro-ampere, which can be directly readout for processing. The optical current can be further increased by reducing the channel length, thus reduction and performance enhancement can be achieved at the same time.

Original languageEnglish
Pages149-150
Number of pages2
Publication statusPublished - 1998
EventProceedings of the 1998 IEEE International SOI Conference - Stuart, FL, USA
Duration: 5 Oct 19988 Oct 1998

Conference

ConferenceProceedings of the 1998 IEEE International SOI Conference
CityStuart, FL, USA
Period5/10/988/10/98

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